Advanced Optoelectronics

Our independently developed batch ALD and PEALD systems are designed for cutting-edge applications including Mini/Micro LED, advanced optics, and AR/VR.

Alternative Energy

Our industrial's powder ALD and CVD systems achieve mass production, with innovative processes applied in new energy sectors like lithium batteries.

Advanced Device

UHV thin film deposition systems provide an ultra-clean deposition environment with a base pressure of 10⁻⁹–10⁻¹¹ Torr, enabling the fabrication of high-quality thin films under precisely controlled conditions.

Semiconductor Fabrication

Our independently developed CVD systems—including SiC epitaxial CVD, diamond MPCVD, and PECVD—serve the third-generation, fourth-generation , and silicon-based integrated circuit semiconductor markets.