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Tags:
plasma-enhanced ALD
Optics
AR/VR
Automotive Lens
Surveillance Lens
The system can deposit high-quality thin films such as SiO2, Al2O3, and TiO2 on substrates made of glass, organic materials, polymers, metals, or ceramics.
Product Description
1. Batch-process multi-chamber design significantly increases throughput while dramatically reducing ALD production costs
2. Industry-leading coating uniformity, repeatability, and reliability
3. Enables conformal deposition on entire lens surfaces and 3D micro/nano structures
Specification
| 12-inch wafer Ru film thickness non-uniformity | <1% |
| Batch-to-batch Ru film thickness non-uniformity | <1% |
| Reflectance (R) at visible spectrum | < 0.1% |
| Film thickness accuracy of the AR coating | 0.1 nm |
Application
1. Advanced Optical Films (AR)
2. Third Generation Semiconductors
3. Integrated circuit manufacturing
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