Semiconductor Fabrication

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ZLD independently developed CVD systems—including SiC epitaxial CVD, diamond MPCVD, and PECVD—serve the third-generation, fourth-generation , and silicon-based integrated circuit semiconductor markets. Leveraging 20+ proprietary core patents, Yunmao has established technological barriers in key process module innovation, reaction chamber flow field design and in-situ monitoring systems. 


These advancements deliver exceptional performance and stability for high-frequency devices, power electronics, MEMS sensors and Memory chips. As the global semiconductor industry shifts toward wide-bandgap materials, Yunmao strengthens strategic collaborations with industry leaders, accelerating the industrialization of next-gen semiconductor materials and devices through customized equipment solutions.


Semiconductor Fabrication


Other Applications

ALD & UHV SYSTEM

Desktop ALD

Desktop ALD

Powder ALD

Powder ALD

Multi-Chamber UHV Magnetron Sputter

Multi-Chamber UHV Magnetron Sputter

4 Chamber UHV Evaporator

4 Chamber UHV Evaporator

Thermal Batch ALD

Thermal Batch ALD

Plasma Batch PEALD

Plasma Batch PEALD
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