English
English
Tags:
Optics
Josephson-junction fabrication
Semiconductor
Ion Milling
Oxidation
This system includes four process chambers: load-lock (pre-treatment) chamber, ion milling chamber, evaporator, oxidation chamber. Specially designed manipulator allows tilting and rotation of wafer with little friction. Fully automatic operation guarantee reproducible results. QBT-J is the advanced solution to tunneling junction, optical structure, metal-insulator-metal structure, capacitor and so on.
Product Description
1. It includes 4 process chambers: load-lock (pre-treatment) chamber, ion milling chamber, evaporator, oxidation chamber.
2. Fully automatic operation guarantee reproducible results.
Specification
| Sample Size | Max 8 inch Wafer and smaller chips compatible |
| Wafer Heating | RT-900ºC or Liquid nitrogen cooled |
| Ion Milling | Kaufman ion source, sizes upon request |
| E-beam Evaporation | UHV Linear Evaporation Source, 8KW Power Supply (upon request) |
| Oxidation | Multi-level oxidation process with shower head design |
| Uniformity | Sheet Resistance Uniformity 1 Sigma NU%<±2% (8 inch wafer with 5 mm removal from the edge) |
| Load lock chamber base pressure | ≤5E-9 Torr |
| lon Milling chamber base pressure | ≤9E-10 Torr |
| Ebeam Evaporation chamber base pressure | <9E-10 Torr |
Application
1. Josephson-junction fabrication
2. semiconductor
3. Optics
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