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  - Desktop ALD
  - Powder ALD
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  - Multi-Chamber UHV Magnetron Sputter
  - 4 Chamber UHV Evaporator
Industrial Products
- ALD
  - Plasma Batch PEALD
  - Thermal Batch ALD

Powder ALD

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It enables uniform and precisely controlled ALD or MLD on micro-nano powders, featuring patented powder containers, dynamic powder fluidization mechanisms, fully automated temperature control. The capacity is up to 100 g/1000 g.

Designed for R&D and Widely Used in：

1.Battery Applications: Enhances battery performance

2.Catalysis Applications: High-efficiency catalysts

3.Metal Powder Processing: Improves powder flowability

4.Advanced Materials Development

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Product Description

1. Customizable for batch & scalable production

2. Proprietary nano-ALD ensures uniform, high-coverage coating

3. Complete coating for ultra-high surface area materials

Specification

Sample Capacity	100g/1000g (customizable)
Reaction Temperature	RT-300°C
Precursor Heating	RT-200°C
Coating Non-uniformity	<3%
Ozone Generator	Optional Configuration, Production Efficiency: 15 g/h
Deposition Rate	1-2Å/Cycle (AI2O3)

Application

1. Lithium-ion batteries

2. Metallic powders

3. Alloy powders

4. Catalysts

Related FAQs

What are the advantages of ALD coating compared to traditional methods like solution-phase processes?

ALD addresses the critical limitations of traditional solution-phase and solid-phase coating methods—such as poor uniformity, uncontrolled thickness, and substrate damage—through atomic-level precision, strong interfacial bonding, mild processing conditions, and exceptional conformity on complex structures.

What types of thin films can Powder ALD primarily deposit?

Oxides：Al2O3、ZnO2、HfO2、TiO2、SiO2、SnO2 etc.；Phosphates & Lithium Compounds：TiPO4、AlPO4、LiNbO3、LixTiyOz, etc.；Metals: Cu、Pt、W thin films,etc.

What is the maximum powder processing capacity of ZLD Powder ALD?

1000g

What are the advantages?

1.Enhances battery performance 2.Synthesis of highly efficient catalysts 3.Improves powder flowability and handling 4.Nanomaterial surface functionalization 5.Modifies powder characteristics for better compressibility

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